Examples of Dry Etched Features - plasway-Technologies GmbH

• Plasma (Etch) Process/Tool  Know How

since 25 years

• Process /Tool Development
  
• Experience with Technologies down to 3X nm
  
• Dry Etching Experience of almost all Materials

(Si, SiO2,SiON,SiN,Al,C,ZrO,HfO,Nb)

• High Aspect Ratio Dry Etching

Silicon (80:1) and SiO2 Etch (25:1)

• Double Patterning
  
• Gate Stack / Transistor Etch