Process Control and Analytics - plasway-Technologies GmbH

Way´s to efficiency
Maecenas vitae congue augue,
nec volutpat risus.
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Plasma/Chamber characterization with integrated and or external Sensors
and partly in cooperation with Partners:

  • Absolute concentration measurement of Molecules (Reactants, SiH4, SiF4) with IR Absorption Analyses
  • Quadropol Mass Spectrometry
  • Optical Emission Spectrometry

Process Analytics and More in cooperation with Partners:
      • FIB
      • SEM
      • EDX
      • XPS
      • SIMS
      • TOF SIMS
      • TEM
    • In addition interpretation of analytics and support in route cause analyses.
    • Definition of next Steps
    • Especially in the area of Dry Etching direct proposal for recipe optimization.
Plasway leads the way to Plasma Processing

+49 351 2681262
+49 351 2118294 (fax)
Plasway-Technologies GmbH
Heinrich-Heine-Str. 2b
01728 Bannewitz
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