Process Control and Analytics - plasway-Technologies GmbH
Way´s to efficiency
Maecenas vitae congue augue,
nec volutpat risus.
Hauptmenü:
Plasma/Chamber characterization with integrated and or external Sensors
and partly in cooperation with Partners:
- Absolute concentration measurement of Molecules (Reactants, SiH4, SiF4) with IR Absorption Analyses
- Quadropol Mass Spectrometry
- Optical Emission Spectrometry
Process Analytics and More in cooperation with Partners:
- FIB
- SEM
- EDX
- XPS
- SIMS
- TOF SIMS
- TEM
- In addition interpretation of analytics and support in route cause analyses.
- Definition of next Steps
- Especially in the area of Dry Etching direct proposal for recipe optimization.
