Hauptmenü:
- Process time analyzes and optimization
- Overhead time reduction
- Clean time optimization
- Uptime improvement:
- Conditioning Strategy
- Wet Clean Optimization
- Chamber to Chamber matching
- Gas and Material consumption
- Support in Analytics and rout cause finding
- Leading and guiding of trouble shooting Teams
- Tool and process development
(Initial development, Characterization)- External development and pilot production with partners
- Process control methods
(OES, IR absorption, QMS)- Cleaning efficiency